UHV-System:

In order to minimize the internal vibrations the UHV system is kept as simple as possible. Instead of having separate chambers for sample preparation and analysis we choose to have only one chamber with an integrated gate valve. This also minimizes the length of the He-coolable manipulator, which can be used to prepare, analyze and transfer the samples and tips (T > 10K). The standard preparation chamber includes flanges for K-cells and E-Beam Evaporators as well as analytical equipment (LEED, Auger, XPS, ISS, SIMS etc.)

LHe coolable manipulator (4-axis):

• Range: X, Y: +/- 50mm, Z: 400mm, 360º Rotation
• Manipulator Temperature: >5K (20K), sample T: >10K (23K), for He Consumption of: 20 (2-3) l/h
• Preparation at lowest temperatures (LT)
• Sample analysis at low temperatures
• Fast sample cool down (<30min)
• Tunneling immediately after the transfer into the STM (10K)

Integrated gate valve on 6" Flange (NW100CF):

• Allows compact system design (Valve welded in between both chambers)
• Manipulator is 300mm shorter than with two separate chambers for preparation and STM
• User can look into the chamber while using the manipulator

Further Components:

• Load lock with valves for the differential pumping of the manipulator and valves for gas inlet.
• Passisve vibration isolation system with air legs (>5Hz)
• Frame, bake out oven, rack for electronics

News | Home | Products | Site Map | Contact Info | E-Mail Us