UHV Wavelength Dispersive Spectrometer, Wavelength Dispersive Spectroscopy, Energy Dispersive Spectroscopy, X-ray Fluorescence (XRF) Spectroscopy, X-ray, EUV or XUV Lithography, Plasma Diagnostics, X-Ray Microscopy, Synchrotron X-Ray Optics, Micro-XPS or ESCA, Diffractometry

WDS in True UHV Design with All Metal Seals
Based on the Proven HEXS Spectrometer Concept
Applications: Wavelength Dispersive Spectroscopy, Energy Dispersive Spectroscopy, X-ray Fluorescence (XRF) Spectroscopy, X-ray, EUV or XUV Lithography, Plasma Diagnostics, X-Ray Microscopy, Synchrotron X-Ray Optics, Micro-XPS or ESCA, Diffractometry
Retractable X-Ray Collimating Optic, Hexagonal Diffractor Turret, Sealed Proportional Counter, X-Ray Concentrating Optics with Small Detector Window
UHV Gate Valve and Pumping System for Achieving UHV Levels. This system IS NOT DIFFERENTIALLY PUMPED
HEXS Data Acquisition and Processing Software

New UHV Wavelength Dispersive Spectrometer from Parallax Research