Electron Source ES 40 C1 - scanable electron source with a tungsten hair pin cathode.

The Electron Source ES 40 C1

The Electron Source ES 40 C1 is a scanable electron source with small spot profile.

Electron Source ES 40C1

High electron current
Wide energy range
Small spot size
Integrated beam deflection

The Electron Source ES 40C1 is a scanable electron source with small spot profile. Due to the high transmission of its Einzel Lens, the ES 40C is an electron source which gives high electron beam current over a wide energy range. The source can be adapted to a customer requirements regarding the insertion depth and the source shielding material (µ-metal or copper). The ES 40C1 is designed for a stable and reliable operation in such applications like: AES, scanning applications, imaging, EELS and electron pulse or desorption experiments.

Main features:

Energy range 20 eV - 5 keV
Energy width < 1 eV
Sample current up to 200 µA
Scan area 10 x 10 mm²
Mu-metal shielding
Hair pin cathode
Insertion depth: 154mm, OD: 34.4 mm
Mounting flange: 2.75"OD (NW38CF)
Maximum Bakeout Temperature: 250°C

Options:

Customized insertion depth
Cu-shielding for mu-metal chamber mounting
Fine focus microformed tip cathode

Power Unit ES-PS40C

The ES-PS40C is equipped with: Electron Emission Controller and Extractor Units provides heating for the cathode, extracting the electrons and keeping emission current at desired level. Energy and Focus High Voltage Units allow to set electron beam energy and focusing the beam. Deflection unit allows to set beam position on the sample.

All required voltages are supplied to Electron Source with one high voltage plug. User Interface contains a large letters LCD display (2 x 20 chars), function keys and digital encoder to control precisely all parameters which can be stored and recalled.
The last stored parameters are recalled after switch on the unit. The process parameters can be controlled by the computer through the RS-485 communication interface and dedicated application. The ES-PS40C is mounted in the 19” rack (full-width, 3 units height) or free standing.

Power Unit PU-EQ 22/35

Specifications:

	Beam Energy:	0 – 5000 eV at max 1mA; Error < 1V; Ripple < 0.2 Vpp
	Filament current:	1 - 2.2A at max 10V
	Electron Current :	1µA – 1mA ; Error < 2%
	Beam Focus:	1V - 5000V at max 1mA,Error < 1V; Ripple <0,2Vpp
	Beam Deflection:	± 650V for X and Y deflection plates
	User Interface:	LCD text display 2 x 20 chars with Functions keys Suitable digital encoder for editing precisely all parameters A set of process parameters can be stored and recalled
	Communication:	2 wire EIA-485 for control all parameters by external computer
	Communication Interfaces (option):	EIA-232, 2 wire EIA-485, 4 wire EIA-485
	Dimensions (W x H x D):	483 x 133 x 350 mm

SPECS Technologies Corporation
3318 Plantation Dr.
Sarasota, Florida 34231
Phone: (941) 362-4877
Fax: (941) 364-9706
support@specs.com