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4 Axis Manipulator for Vacuum System

Description

The 4 Axis Manipulator with Z, R1 Axis Motorization is a high precision, high rigidity, UHV specimen manipulator of modular construction, suitable for a range of X, Y, Z and R1 motions. The modular construction means that the specification can be upgraded or modified by the addition or replacement of well defined modules. X and Y axis of the manipulator are operated manually by micrometers. Z and R1 axis are motorized by stepper motors. Motorized Z axis can still be operated manually by handwheel. The standard mounting flange is DN 100CF or DN 160CF and the standard travelling flange is DN 40CF (optionally DN 63CF). The 4 Axes Manipulator is a connection of XY Stage, Z Slide and Vacuum Part of Manipulator (see chapters XY Stages and Z Slides).

Application

The 4 Axes Manipulators are used for manipulating of sample holders and scientific tools with respect to a sample's position. These manipulators, when combined with sample holders mounted on and rotary drives, allow precise placement and manipulation of samples in UHV environments. The manipulator itself moves the sample on three orthogonal axis, X, Y, and Z while a rotary drive provides rotation R1 around Z axis. They can work in any orientation.

Additional information

The 4 Axes Manipulators have the Sample Receiving Stations on the Vacuum Parts of Manipulator for holding sample holders. The station is equipped with electrical contacts (2 pcs thermocouple type K, C or E, 2 pcs sample potential up to 2500V, 2 pcs heating current up to 20A) and cooling contact (Cool Finger) for liquid nitrogen cooling. The manipulator has all necessary electrical, gas, mechanical feedthroughs, tubes, cables and electronic devices for motorized Z and R1 axis. X, Y axis can be also motorized according to motorization of XY Stages (see chapters Stepper Motor Shifts for XY Stages). The Stepper Motor Shift for Z axis is controlled by electronic device SMCD20 (see chapter Stepper Motor Control Driver SMCD20). The Stepper Motor Shifts for R1 axis is controlled by electronic device SMCD10 (see chapter Stepper Motor Control Driver SMCD10).

 




SPECS Technologies Corporation
3318 Plantation Dr.
Sarasota, Florida 34231
Phone: (941) 362-4877
Fax: (941) 364-9706
support@specs.com

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