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Two/Three
NTS100 Stages arranged in an XY/XYZ configuration using Straight-, Right
Angle- and Universal Mounting Plate
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Motion
Increment less than 0.4 nm
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Travel
Distance 10-100 mm
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Travel
Velocity up to 2000 µm/s
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Wide
Velocity Range (6 orders)
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Continuous
or Stepping Mode
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AutoLock
(Self-Locking) when the unit is de-energized
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Acceleration
Time to Maximum Velocity less 0.3 ms
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Response
Time 10msec
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Open-Loop
and Close-Loop Modes Feedback through a High Resolution Optical Encoder
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Long-term
Drift in Open Loop less than 2nm per hour @ 20°C
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Ideal
for Nanomotion and Nanopositioning
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High
Reliability DSP Multichannel Controller