MBE/CVD and Surface Analysis System
MBE-SiC

Load-lock Chamber:

• Diameter: 40 mm

• Sample storage up to 6 samples

• 2" Substrate Size

• Sample Degassing Station

Reactor and Growth Chamber:

• Diameter: 450 mm

• 8 Ports for Effusion Cells, E-Beam Evaporators, Plasma Source
  
  

• 4 Ports for Gas Injectors and Crackers

• Heatable Sample Manipulator up to 1300°C, Sample Rotation

• Ports for RHEED, Flux Monitor, Pyrometer, RGA

• Pumping System: Ion Pump with Integrated Titanium Sublimation Pump, Turbo Molecular Pump with Magnetic Bearings and Cryopump, Base Pressure: <1x10-11 mbar

• A tight shutter separates the analysis and the deposition area

• Ports for Hemispherical Energy Analyzer, X-Ray Source, UV-Source, Electron Source, Ion Source, Mass Spectrometer, LEED Optics

• AFM/STM with Helium Cooling and Highest Resolution SEM Capabilities

• Heatable Sample Manipulator