MBE System for compound semiconductor, HBT, HEMT, quantum well, quantum dot, heterostructures, LED, VCSEL

MBE-MSE System

MagnetoOptic Layer System

MSE System
3 Chamber MBE System for magneto-optic-layer deposition and analysis, sample size 1"

Load lock chamber:

Diameter: 160 mm
4 stage sample manipulator

Pumping equipment: turbo molecular pump with magnetic bearing

Analysis chamber:

Diameter: 300 mm
X,Y,Z high precision sample manipulator
Pumping equipment: ion pump with integrated Ti sublimation pump

Analytic equipment: LEED optic, AFM/STM, UV source / X-ray source electron analyzer, Kerr measurement

MBE-Chamber:

Diameter: 450 mm, LN2 cryopanel
X,Y,Z sample manipulator, motorized rotation
Substrate heater, Tmax. = 1000 °C
Pumping equipment : ion pump with integrated Ti sublimation pump
Sources : 6 effusion cells (models SFC, CRC, HTC) 4-pocket e-beam evaporator
Analysis equipment: RHEED system, mass spectrometer, beam flux monitor (model BAF) quartz oscillator sensor

SPECS Technologies Corporation
3318 Plantation Dr.
Sarasota, Florida 34231
Phone: (941) 362-4877
Fax: (941) 364-9706
support@specs.com

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