MBE System for III-V Materials

Load-lock Chamber:

• Sample Load Lock Station and Buffer Chamber

• Sample storage up to 6 specimen

• 2" Substrate Size (larger wafer size handling available)

• Sample Degassing Station

Growth Chambers:

• UHV Growth Chamber with cryo-shroud

• 8 (or more) Ports for Effusion Cells, E-Beam Evaporators, Plasma Source
  
  

• 8 (or more) Ports for pneumatically (electrically, manually) operated Shutters

• Heatable Sample Manipulator up to 1300°C, automated Sample Rotation

• Ports for In-Situ Characterization Tools, RHEED, Flux Monitor, Pyrometer, RGA

• Pumping System: Ion Pump with Integrated Titanium Sublimation Pump, Turbo Molecular Pump and Cryopump, Base Pressure: <1x10-11 mbar

• A hermetically sealed shutter system seperates the vacuum vessels.

MBE System with two Growth Chambers for III-V Materials