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UHV Chambers

 

 

UHV Custom Built Vacuum Chambers, Mu-metal Recipients, Liners, UHV Systems and Assemblies


Crucibles

 

Crucibles

Crucibles for all common MBE systems and effusion cells in a variety of sizes and materials:

PBN, BeO, Alumina, VC, Ta, W, Mo etc.


Beam Flux Monitor BAF

 
Beam Flux Monitor
The beam flux monitor BAF is used for the precise measurement of beam equivalent pressures of different molecular beams in an MBE system.


Custom Designed Manipulators

 
ManipulatorManipulator

Custom designed manipulators for MBE systems, up to 8" substrate size and heatable up to 2000 degC.


MBE Substrate holders

 
Substrate HolderSubstrate Holder

Indium-free sample holders with easy-mount sample exchange system for any MBE system.


Effusion Cell Shutters and Window Shutters

 
ShutterShutter
Linear and rotary shutters for effusion cells.

Shutters for substrates, to protect windows and RHEED screens.


MBE Control System

 
MBE Control System
Enhanced Multi-Environment Real Time Control EMERALT for MBE and CVD Systems


Power Supplies for Effusion Cells

 
Power Supplies

For optimized operation of effusions cells, gas sources, heating stages of the manipulators

Very stable, both DC and AC output are available.


Water-cooling Systems and Cryoshrouds

 
Watercooling

Water Cooling Jacketsm Cluster Flange Assemblies and Cryoshrouds for Effusion Cells and Chamber Wall Cooling.

 


Heating Lamp

 
Heating Lamp for UHV applications, wafer heating and annealing


Heatable Windows

 

Heatable Windows

Heatable window with outstanding performance, window temperatures up to 1000 °C


Rotary Feedthroughs

 
FeedthroughFeedthrough

A variety of motion feedthroughs as manually, pneumatically or electrically driven shutter drives.





SPECS Technologies Corporation
3318 Plantation Dr.
Sarasota, Florida 34231
Phone: (941) 362-4877
Fax: (941) 364-9706
support@specs.com

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