As, S, Sb and Se are typically evaporating as molecules when using a standard low- temperature-effusion cell. To improve the quality of the epilayers it can be helpful to crack these molecules. A special heating system attached to the top of the Low-Temperature-Effusion cell cracks these molecules at temperatures much higher than the evaporation temperature. Special insulation parts are used to minimize the crosstalk between the two heating systems.
Technical Data:
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Standard: |
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Type |
CRC |
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Heating System |
Radiation heating, tantalum wires with PBN insulators |
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Temperature range |
100 °C ...800 °C
bulk zone |
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Temperature stability |
<=0.1 K depending on the PID controller |
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Max. outgas temp. |
1200 °C Effusion
cell without crucible |
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Max. power |
220 W bulk zone |
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Max. current |
8 A bulk zone |
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Bakeout temperature |
250 °C |
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Conditioning |
Heated to maximum temperature with and without crucible |
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Shipping |
Stainless steel container with valve |
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Custom: |
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Flange size |
CF 40 / CF 63 |
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Max outer diameter |
38 mm |
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Length |
As specified |
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Thermocouple type |
Two independent thermocouples type C / WRe 5%-26% (or specified) |
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Crucible material |
PBN / PGR / W / Ta / quartz |
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Crucible capacity |
5 - 39 ccm |
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Options: |
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Integrated shutter |
Optional |
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Water cooling |
Optional |
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Other dimensions |
As specified |
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Crucible with insert |
Optional |
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Downward looking |
Optional |
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