Atomic Hydrogen Source, Hydrogen Cracker
HLC
The CreaTec atomic hydrogen source HLC is used as a thermal cracker of hydrogen. Atomic hydrogen allows cleaning of substrates like Ga, As, InP, etc. at low temperatures and is used for surfactant growth.
The hydrogen gas (H2) flows through a molybdenum tube to a hot tungsten filament which is located at the end of this tube. It can be heated to a temperature of up to 2500 °C to achieve an excellent cracking efficiency of the hydrogen gas.
By using a precision valve, hydrogen pressure can be directly adjusted. With a mass flow controller, mounted between the hydrogen bottle and the leak valve, the pressure control can be made extremely accurate.
Technical Data:
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Standard: |
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Type |
HLC |
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Heating System |
Radiation heating |
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Temperature range |
200 °C ...2500 °C |
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Temperature stability |
<=0.1 K depending on the PID controller |
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Max. outgas temp. |
2500 °C |
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Max. power |
280 W |
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Max. current |
25 A bulk |
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Bakeout temperature |
250 °C |
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Conditioning |
Heated to maximum temperature with and without crucible |
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Shipping |
Stainless steel container with valve |
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Custom: |
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Flange size |
CF 40 / CF 63 |
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Max outer diameter |
38 mm |
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Length |
As specified |
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Thermocouple type |
Type C / WRe 5%-26% |
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Options: |
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Other dimensions |
As specified |
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Molybdenum version |
Optional |
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Wolfram version |
Optional |
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(PDF)