
The SPECS Scientific Mini Maria Vaporizer is a mini organic evaporator capable of evaporating small quantities of almost any organic material. The instrument design incorporates two separate evaporation zones with two crucible from which the materials may be evaporated. Each of the evaporation zone is fitted with a thermocouple allowing materials to be evaporated with highest uniformity. The standard cell has a fixed target position of 45 deg and the angle may be user configured to customer's specifications. The crucible is heated evenly from the surrounding individual filament.
The high-precision design allowing evaporation temperatures of 800 degC to be reached.
The power supply is configured to supply power to each one of the evaporation zones allowing homogenious evaporation of organic materials.
Low power ~50W may be used for high vapour pressure materials or up to 300 watts may be used for lower vapour pressure materials depending on the application and the deposition rate required.
The evaporator mounted on an 2.75"O.D. flange (NW35CF) is fully UHV compatible.
Applications:
Evaporation is possible of materials such as organic and biological materials
and materials with low vapour pressure. Various Crucibles (1 cm3)
from various materials (W,
Mo, Ta, Alumina, PBN, PGR)
can also be
installed
As the material evaporates, crucibles may be exchanged without breaking vacuum (optionally).
The deposition rates may be controlled from sub-monolayer/minute up to ~2nm/min and up to 1nm / second for higher vapour pressure materials at 10cm working distance, using the included 300W power supply and controller.
Examples:
Evaporation from crucible is usually manually controlled in combination with a quartz crystal monitor to indicate the deposited thickness. This is the most common use of the instrument and is ideal for depositing a few mono-layers of material.
Closed loop control may also be obtained using the integrated thermocouple to measure the temperature. The monitor signal is amplified and fed back to a PID controller to regulate the supply. This method provides a direct qualitative measurement of the flux actually leaving the evaporator.
(1) The incorporation of a thermocouple feedthrough for each crucible, means that there are no flexing leads in vacuum which can lead to fatigue and shorting problems.
(2) Each evaporation zone is entirely separate from the other and is surrounded by a water-cooled jacket for efficient water cooling
(3) Each evaporation zone is completely enclosed in a water-cooled copper shroud. The water sees only stainless steel and welded joints for long term corrosion resistance, with the stainless steel cooling pipes permanently bonded to the copper for complete and reliable thermal contact.
(4) Each filament assembly is constructed as an easily replaced unit and yet still allows the user to replace just the filament using standard tungsten wire. Spare filament assemblies can be purchased or prepared in advance and can be quickly and easily replaced.
(5) The
filament encircles the crucible providing much more even heat distribution
than one-sided filaments. Higher temperatures are therefore possible without
local damage to crucibles.
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Specifications: |
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| Mounting Flange: | 2.75" (NW35CF) | ||
| In Vacuum Length: | 210mm (8.25") or customized to specification | ||
| In Vacuum Diameter: | 38mm (1.5") max | ||
| Bakeout Temperature: | 200oC | ||
| Thermocouple: | Permits measurement of the temperature near the crucible. Includes the thermocouple (Type K) and feedthrough | ||
| Crucible Volume: | 1cm3 | ||
| Crucible Materials: | W, Ta, Mo, Pyrolytic Graphite, Quartz | ||
| Crucible Liner Materials: | PBN, Alumina | ||
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| Deposition Rate: | Measured
at 100mm: Higher vapour pressure materials: up to 1nm/second. Deposition rates controllable down to <0.01A/s = 0.2 monolayer/min. |
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| Beam Divergence: | ~15o half angle | ||
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| Size: | 19" rack mount. 3U height. 115V, 60Hz (230VAC, 50Hz optional) | ||
| Heating Power: | 2 x 0-300W, I=10 A, U=30V | ||
| PID Controllers: |
For
PID Control of the Power Supplies, Eurotherm |
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Options: |
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| 1 | Shutter: | For shutting off the beam. Manually operated. | |
| 2 | Shutter Motorisation: | Solenoid drive. Requires option (1) above. | |
| 3 | Crucible Refill: |
Crucible Refill
without Breaking Vacuum |
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| 4 | Crucibles: | Mini-crucibles with 1cm3 capacity in a variety of materials including, W, Ta, Mo, PG (pyrolytic graphite). Matching lids also available. | |
| 5 | Crucible Liners: | For reactive materials e.g. aluminium, an inert crucible liner is recommended. These are available in PBN and Alumina. | |
| 6 | Cluster Flange Assembly: | NW100CF (6.00"O.D.) Cluster Flange with 3x NW35C (2.75"O.D.) ports for mounting 3x MARIA units. (Please specify desired working distance when ordering.) | |
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