Material |
Symbol |
Evaporation Source |
Crucible |
Melting
|
Temperature (°C) for
|
||
|
..........
|
..........
|
..........
|
..........
|
(°C)
|
10-8
|
10-6
|
10-4
|
|
Aluminium
|
Al
|
PBN
|
660
|
685
|
812
|
972
|
|
|
Antimony
|
PBN
|
631
|
279
|
345
|
425
|
||
|
Argon
|
Ar
|
Alumina
|
...
|
...
|
...
|
...
|
|
|
Arsenic
|
As
|
Valved Cracker, Cracker, Valved or |
PBN
|
817
|
104
|
150
|
210
|
|
Barium
|
Ba
|
Ta, Mo
|
727
|
272
|
354
|
462
|
|
|
Beryllium
|
Be
|
BeO, VC
|
1287
|
707
|
832
|
997
|
|
|
BioMaterials
|
...
|
Quartz, PBN, Ta, PGR
|
...
|
...
|
...
|
...
|
|
|
Bismuth
|
Bi
|
Al2O3,
BeO, VC
|
271
|
329
|
409
|
517
|
|
|
Boron
|
B
|
C, VC
|
2075
|
1282
|
1467
|
1707
|
|
|
Cadmium
|
Cd
|
Al2O3,
Quartz, PBN
|
321
|
74
|
119
|
177
|
|
|
Calcium
|
Ca
|
Al2O3,
Quartz, PBN
|
842
|
282
|
357
|
459
|
|
|
Carbon
|
C
|
PGR
|
3550
|
1657
|
1867
|
2136
|
|
|
Cerium
|
Ce
|
Al2O3,
BeO, VC
|
795
|
970
|
1150
|
1380
|
|
|
Cesium
|
Cs
|
Quartz, PBN
|
29
|
-16
|
22
|
80
|
|
|
Chlorine
|
Cl
|
Al2O3
|
...
|
...
|
...
|
...
|
|
|
Chromium
|
Cr
|
VC
|
1907
|
837
|
977
|
1157
|
|
|
Cobalt
|
Co
|
Al2O3,
BeO
|
1495
|
922
|
1067
|
1257
|
|
|
Copper
|
Cu
|
Al2O3,
Mo, Ta, BeO
|
1085
|
722
|
852
|
1027
|
|
|
Dysprosium
|
Dy
|
Ta
|
1412
|
625
|
750
|
900
|
|
|
Erbium
|
Er
|
PBN, Ta, W
|
1529
|
649
|
777
|
897
|
|
|
Europium
|
Eu
|
Al2O3,
Mo, Ta, PBN
|
822
|
283
|
361
|
466
|
|
|
Gallium
|
Ga
|
PBN, Al2O3,
BeO, Quartz
|
30
|
619
|
742
|
907
|
|
|
Germanium
|
Ge
|
PBN, Al2O3,
Quartz
|
938
|
812
|
947
|
1137
|
|
|
Gold
|
Au
|
Al2O3,
PBN, VC,
|
1064
|
807
|
947
|
1132
|
|
|
Hafnium
|
Hf
|
...
|
2227
|
2160
|
2250
|
3090
|
|
|
Hydrogen
|
H
|
...
|
...
|
...
|
...
|
...
|
|
|
Indium
|
In
|
Al2O3,
PBN
|
157
|
488
|
597
|
742
|
|
|
Iridium
|
Ir
|
...
|
2410
|
1850
|
2080
|
2380
|
|
|
Iron
|
Fe
|
Al2O3,
BeO
|
1538
|
858
|
998
|
1180
|
|
|
Lanthanum
|
La
|
Al2O3
|
920
|
990
|
1212
|
1388
|
|
|
Lead
|
Pb
|
Al2O3
, W, Mo, Ta, PBN
|
328
|
342
|
427
|
497
|
|
|
Lithium
|
Li
|
Al2O3,
BeO, PBN
|
180
|
235
|
306
|
404
|
|
|
Lutetium
|
Lu
|
Al2O3
|
1663
|
870
|
1228
|
1376
|
|
|
Magnesium
|
Mg
|
Al2O3,
VC, PBN
|
650
|
185
|
246
|
327
|
|
|
Manganese
|
Mn
|
Al2O3,
BeO
|
1246
|
505
|
611
|
747
|
|
|
Mercury
|
Hg
|
Al2O3,
Quartz, PBN
|
-39
|
72
|
-44
|
7
|
|
|
Methane
|
CH4
|
...
|
...
|
...
|
...
|
...
|
|
|
Molybdenum
|
Mo
|
...
|
2610
|
1592
|
1822
|
2117
|
|
|
Nickel
|
Ni
|
Al2O3,
BeO,VC
|
1455
|
927
|
1072
|
1262
|
|
|
Niobium
|
Nb
|
...
|
2468
|
927
|
1072
|
1262
|
|
|
Nitrogen
|
N
|
PBN
|
...
|
...
|
...
|
...
|
|
|
Organics
|
...
|
Al2O3,
Quartz, PBN
|
...
|
...
|
...
|
...
|
|
|
Oxygen
|
O
|
Alumina
|
...
|
...
|
...
|
...
|
|
|
Palladium
|
Pd
|
Al2O3,
BeO
|
1555
|
842
|
992
|
1192
|
|
|
Phosphorus
|
P
|
Al2O3,
PbN, Ta/Mo
|
44
|
54
|
88
|
192
|
|
|
Platinum
|
Pt
|
ThO2,
C
|
1768
|
1292
|
1492
|
1747
|
|
|
Polymers
|
...
|
Al2O3,
Quartz, PBN
|
...
|
...
|
...
|
...
|
|
|
Potassium
|
K
|
Al2O3,
Quartz, PBN
|
64
|
21
|
65
|
123
|
|
|
Rhenium
|
Re
|
...
|
3180
|
1928
|
2207
|
2570
|
|
|
Rhodium
|
Rh
|
...
|
1966
|
1277
|
1472
|
1707
|
|
|
Ruthenium
|
Ru
|
...
|
2310
|
1780
|
1990
|
2260
|
|
|
Scandium
|
Sc
|
Al2O3,
BeO
|
1541
|
772
|
917
|
1107
|
|
|
Selenium
|
Se
|
PBN
|
221
|
63
|
107
|
164
|
|
|
Silicon
|
Si
|
Ta
|
1414
|
992
|
1147
|
1337
|
|
|
Silver
|
Ag
|
Al2O3,
Mo
|
962
|
574
|
685
|
832
|
|
|
Sodium
|
Na
|
Quartz, PBN
|
98
|
74
|
123
|
193
|
|
|
Strontium
|
Sr
|
VC, Mo
|
777
|
241
|
309
|
404
|
|
|
Sulfur
|
S
|
PBN
|
115
|
-10
|
17
|
55
|
|
|
Tantalum
|
Ta
|
...
|
2996
|
1960
|
2240
|
2590
|
|
|
Tellurium
|
Te
|
PBN
|
450
|
155
|
209
|
280
|
|
|
Thallium
|
Tl
|
Al2O3,
Quartz
|
304
|
280
|
360
|
470
|
|
|
Thorium
|
Th
|
W, Ta, Mo
|
1845
|
1430
|
1660
|
1925
|
|
|
Tin
|
Sn
|
PBN
|
232
|
682
|
807
|
997
|
|
|
Titanium
|
Ti
|
TiC
|
1660
|
1067
|
1235
|
1453
|
|
|
Tungsten
|
W
|
...
|
3410
|
2117
|
2407
|
2757
|
|
|
Vanadium
|
V
|
W, Mo
|
1910
|
1162
|
1332
|
1547
|
|
|
Ytterbium
|
Yb
|
Ta
|
824
|
247
|
317
|
417
|
|
|
Yttrium
|
Y
|
Al2O3
|
1526
|
957
|
1117
|
1332
|
|
|
Zinc
|
Zn
|
Al2O3,
Quartz, PBN
|
420
|
123
|
177
|
247
|
|
|
Zirconium
|
Zr
|
...
|
1852
|
1477
|
1702
|
1987
|
|
This guide was prepared
by Edward Graper of Lebow
Corporation, and is being made available to assist SPECS Scientific Instruments,
Inc. customers. In the preparation of this guide, every effort has been made
to ensure accuracy, completeness and clarity. Unfortunately, in a work of this
scope, errors are inevitable. Neither Edward Graper nor Lebow Corporation warranties
the accuracy of this information or the results of its applications. Use this
information at your own risk, as a general guide. Use an independent check for
important data. This guide may not be reproduced in any way without written
permission from Lebow Corporation, which will generally be granted.
This Evaporation Guide is also based
on the work of Albrecht Fischer of VTS-CreaTec
GmbH and Dr. Christian Bradley of Oxford
Scientific.
Some materials and their
compounds are extremely toxic and must be handled with great care. Manufacturers
safety and handling instructions must be strictly followed! Neither Lebow Corporation
nor SPECS Scientific Instruments, Inc. accept responsibility for any misuse
of materials or their evaporation and deposition applications.
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