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NEW Evaporation Guide

Material

Symbol

Evaporation Source

Crucible

Melting
Point

Temperature (°C) for
Vapor Pressure in Torr

..........
..........
..........
..........
(°C)
10-8
10-6
10-4
Aluminium
Al
Cold Lip Effusion Cell
PBN
660
685
812
972
Antimony
Sb

Valved Cracker, Cracker or

Low Temp Effusion Cell

PBN
631
279
345
425
Argon
Ar
ECR Plasma Source
Alumina
...
...
...
...
Arsenic
As

Valved Cracker, Cracker, Valved or

Low Temp Effusion Cell

PBN
817
104
150
210
Barium
Ba
Low Temp Effusion Cell
Ta, Mo
727
272
354
462
Beryllium
Be
Dopant Cell, High Temp Effusion Cell
BeO, VC
1287
707
832
997
BioMaterials
...
Near Ambient Effusion Cell
Quartz, PBN, Ta, PGR
...
...
...
...
Bismuth
Bi
Low Temp Effusion Cell
Al2O3, BeO, VC
271
329
409
517
Boron
B
High Temp Effusion Cell
C, VC
2075
1282
1467
1707
Cadmium
Cd
Low Temp Effusion Cell
Al2O3, Quartz, PBN
321
74
119
177
Calcium
Ca
Low Temp Effusion Cell
Al2O3, Quartz, PBN
842
282
357
459
Carbon
C
Carbon Effusion Cell
PGR
3550
1657
1867
2136
Cerium
Ce
High Temp Effusion Cell
Al2O3, BeO, VC
795
970
1150
1380
Cesium
Cs
Near Ambient or LowTemp Effusion Cell
Quartz, PBN
29
-16
22
80
Chlorine
Cl
ECR Plasma Source
Al2O3
...
...
...
...
Chromium
Cr
High Temp Effusion Cell
VC
1907
837
977
1157
Cobalt
Co
High Temp Effusion Cell
Al2O3, BeO
1495
922
1067
1257
Copper
Cu
Single Filament or HighTemp Effusion Cell
Al2O3, Mo, Ta, BeO
1085
722
852
1027
Dysprosium
Dy
High Temp Effusion Cell
Ta
1412
625
750
900
Erbium
Er
Dual Filament or SingleFilament Cell
PBN, Ta, W
1529
649
777
897
Europium
Eu
Low Temp Effusion Cell , Dual Filament
Al2O3, Mo, Ta, PBN
822
283
361
466
Gallium
Ga

Dual Filament or

Single Filament Effusion Cell

PBN, Al2O3, BeO, Quartz
30
619
742
907
Germanium
Ge

Dual Filament or

Single Filament Effusion Cell

PBN, Al2O3, Quartz
938
812
947
1137
Gold
Au
Single Filament or High Temp Effusion Cell
Al2O3, PBN, VC,
1064
807
947
1132
Hafnium
Hf
E-Beam Evaporator
...
2227
2160
2250
3090
Hydrogen
H

Thermal Gas Cracker/ ECR Plasma Source /

RF Plasma Source

...
...
...
...
...
Indium
In
Dual Filament Effusion Cell
Al2O3, PBN
157
488
597
742
Iridium
Ir
E-Beam Evaporator
...
2410
1850
2080
2380
Iron
Fe

E-Beam Evaporator

High Temp Effusion Cell

Al2O3, BeO
1538
858
998
1180
Lanthanum
La
High Temp Effusion Cell
Al2O3
920
990
1212
1388
Lead
Pb

Low Temp Effusion Cell or Single Filament Cell

Al2O3 , W, Mo, Ta, PBN
328
342
427
497
Lithium
Li
Low Temp Effusion Cell
Al2O3, BeO, PBN
180
235
306
404
Lutetium
Lu
High Temp Effusion Cell
Al2O3
1663
870
1228
1376
Magnesium
Mg
Low Temp Effusion Cell
Al2O3, VC, PBN
650
185
246
327
Manganese
Mn
Single Filament Effusion Cell
Al2O3, BeO
1246
505
611
747
Mercury
Hg
Near Ambient Effusion Cell
Al2O3, Quartz, PBN
-39
72
-44
7
Methane
CH4
ECR Plasma Source
...
...
...
...
...
Molybdenum
Mo
E-Beam Evaporator
...
2610
1592
1822
2117
Nickel
Ni
High Temp Effusion Cell
Al2O3, BeO,VC
1455
927
1072
1262
Niobium
Nb
E-Beam Evaporator
...
2468
927
1072
1262
Nitrogen
N
RF Plasma Source
PBN
...
...
...
...
Organics
...
Near Ambient Effusion Cell
Al2O3, Quartz, PBN
...
...
...
...
Oxygen
O
ECR Plasma Source
Alumina
...
...
...
...
Palladium
Pd
High Temp Effusion Cell
Al2O3, BeO
1555
842
992
1192
Phosphorus
P
Valved Cracker or Valved Effusion Cell
Al2O3, PbN, Ta/Mo
44
54
88
192
Platinum
Pt

E-Beam Evaporator or

High Temp Effusion Cell

ThO2, C
1768
1292
1492
1747
Polymers
...
Near Ambient Effusion Cell
Al2O3, Quartz, PBN
...
...
...
...
Potassium
K
Low Temp Effusion Cell
Al2O3, Quartz, PBN
64
21
65
123
Rhenium
Re
E-Beam Evaporator
...
3180
1928
2207
2570
Rhodium
Rh
E-Beam Evaporator
...
1966
1277
1472
1707
Ruthenium
Ru
E-Beam Evaporator
...
2310
1780
1990
2260
Scandium
Sc
Dual Filament or High Temp Effusion Cell
Al2O3, BeO
1541
772
917
1107
Selenium
Se

Valved Cracker, Cracker or

Low Temp Effusion Cell

PBN
221
63
107
164
Silicon
Si

E-Beam Evaporator or

High Temp Effusion Cell

Ta
1414
992
1147
1337
Silver
Ag
Single Filament or High Temp Effusion Cell
Al2O3, Mo
962
574
685
832
Sodium
Na
Low Temp Effusion Cell
Quartz, PBN
98
74
123
193
Strontium
Sr
Low Temp Effusion Cell
VC, Mo
777
241
309
404
Sulfur
S

Valved Cracker, Cracker or

Valved Effusion Cell

PBN
115
-10
17
55
Tantalum
Ta
E-Beam Evaporator
...
2996
1960
2240
2590
Tellurium
Te
Valved Cracker Effusion Cell
PBN
450
155
209
280
Thallium
Tl
Low Temp Effusion Cell
Al2O3, Quartz
304
280
360
470
Thorium
Th
E-Beam Evaporator
W, Ta, Mo
1845
1430
1660
1925
Tin
Sn

Dopant, Single Filament or

Dual Filament Effusion Cell

PBN
232
682
807
997
Titanium
Ti

E-Beam Evaporator or

High Temp Effusion Cell

TiC
1660
1067
1235
1453
Tungsten
W
E-Beam Evaporator
...
3410
2117
2407
2757
Vanadium
V

High Temp Effusion Cell,

E-Beam Evaporator

W, Mo
1910
1162
1332
1547
Ytterbium
Yb
Low Temp Effusion Cell
Ta
824
247
317
417
Yttrium
Y
High Temp Effusion Cell
Al2O3
1526
957
1117
1332
Zinc
Zn
Low Temp Effusion Cell
Al2O3, Quartz, PBN
420
123
177
247
Zirconium
Zr
E-Beam Evaporator
...
1852
1477
1702
1987

This guide was prepared by Edward Graper of Lebow Corporation, and is being made available to assist SPECS Scientific Instruments, Inc. customers. In the preparation of this guide, every effort has been made to ensure accuracy, completeness and clarity. Unfortunately, in a work of this scope, errors are inevitable. Neither Edward Graper nor Lebow Corporation warranties the accuracy of this information or the results of its applications. Use this information at your own risk, as a general guide. Use an independent check for important data. This guide may not be reproduced in any way without written permission from Lebow Corporation, which will generally be granted.

This Evaporation Guide is also based on the work of Albrecht Fischer of VTS-CreaTec GmbH and Dr. Christian Bradley of Oxford Scientific.

Some materials and their compounds are extremely toxic and must be handled with great care. Manufacturers safety and handling instructions must be strictly followed! Neither Lebow Corporation nor SPECS Scientific Instruments, Inc. accept responsibility for any misuse of materials or their evaporation and deposition applications.




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