New imaging Auger Electron Spectroscopy (iAES) from ELMITEC

• The imaging Energy Analyzer iEA allows to eliminate secondary and inelastically scattered electrons
• iAES SPEPEEM - PEEM III with Imaging Energy Analyzer iEA
• Auger Electron Imaging (AEEM) enables chemical imaging
• Direct Imaging of the Energy Dispersive Plane by new Projector Lens for highest AES Energy Resolution
• High Resolution HR-SEEM with Narrow Energy Window
• Applications: Spectromicroscopy, Microspectorscopy and Photo Electron Diffraction, Photo Electron Spectroscopy

iAES SPEPEEM - PEEM III with Imaging Energy Analyzer	imaging Energy Analyzer

Specifications:

Spectroscopic imaging Mode
Spatial Resolution: <10nm
Energy Resolution: <0.2eV
Remarks: this is the "normal" filtered microscope mode, a series of spectroscopic images can be obtained by changing the start voltage

Directly Imaging of Energy Dispersion
Energy Resolution: <0.2eV
Directly Imaged Energy Range: >15eV
Remarks: a special setting of the projector allows direct imaging of the energy dispersive plane (plane of analyzer exit slits)
the whole spectrum gets visible by changing the start voltage

System Description:

The imaging energy analyzer allows a mayor extension of the application range of the LEEM and PEEM instruments. In the LEEM instrument it can be used to eliminate secondary and inelastically scattered electrons from the LEEM image and the LEED pattern. It is particularly useful when the secondary emission is very strong and partially overlapping with the LEEM/LEED features. By selecting a narrow energy window high resolution SEEM is possible, so that also amorphous materials can be studied with a resolution comparable to that of LEEM. This includes also Auger electrons and, thus, enables chemical imaging. For Auger electron imaging (AEEM) image accumulation in the range of seconds is needed in general while selected small area spot spectra can be obtained in the sub-second range.

In conjunction with the PEEM instrument the imaging energy analyzer is of particular importance in synchrotron radiation-ecited spectromicroscopy, microspectorscopy and photo electron diffraction. Without imaging energy analyzer only threshold or SEXAFS imaging with the resolution limiting secondary electron distribution is possible, with imaging energy analyzer images with energy-selected secondary electrons or element- and bonding-characteristic photo electrons can be obtained. Selected area small spot photo electron spectroscopy and diffraction give additional important information.

The ELMITEC iAES Features and Specifications:

• Low Cost
• Ease of use
• Full magnitec shielding
• LEEM/LEED and PEEM modes computer controlled
• Energy Resolution < 0.2 eV
• Spatial Resolution: 10 nm
• Field of view in PEEM mode 3-85 µm

Videos of ultimate atomic performance can be made visible through observing nanometer scale processes on surfaces in real-time.

LEEMchen Pb layer on W(110) surface, FOV: 10µm, 7 eV	LEEMchen Pb layer on W(110) surface, FOV: 10µm, 7 eV	LEEMchen Pb layer on W(110) surface, FOV: 10µm, 7 eV	LEEMchen Pb layer on W(110) surface, FOV: 10µm, 7 eV

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